بررسی رفتار استاتیکی، فرکانس و ظرفیت خازنی میکروسوئیچ‌های سه‌صفحه‌ای با استفاده از تئوری تنش کوپل بهبودیافته

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[3] Sadeghian H, Rezazadeh G, Osterberg PM. Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches. Journal of Microelectromechanical Systems. 2007;16(6):1334-40. DOI: https://doi.org/10.1109/JMEMS.2007.909237

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[7] Saeedi Vahdat A, Abdolkarimzadeh F, Feyzi A, Rezazadeh G, Tarverdilo S. Effect of thermal stresses on stability and frequency response of a capacitive microphone. Microelectronics Journal. 2010;41:865-73. DOI: https://doi.org/10.1016/j.mejo.2010.07.013

[8] Nabian A, Rezazadeh G, Almassi M, Borgheei AM. On the stability of a functionally graded rectangular micro-plate subjected to hydrostatic and nonlinear electrostatic pressures. Acta Mechanica Solida Sinica. 2013;26(2):205-20. DOI: https://doi.org/10.1016/S0894-9166(13)60020-8

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[10] Rashvand K, Rezazadeh G, Mobki H, Ghayesh MH. On the size-dependent behavior of a capacitive circular micro-plate considering the variable length-scale parameter. International Journal of Mechanical Sciences. 2013;77:333-42. DOI: https://doi.org/10.1016/j.ijmecsci.2013.09.023

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[12] Trinh LC, Nguyen HX, Vo TP, Nguyen TK. Size-dependent behaviour of functionally graded microbeams using various shear deformation theories based on the modified couple stress theory. Composite Structures. 2016;154:556-72. DOI: https://doi.org/10.1016/j.compstruct.2016.07.033

[13] Abbasnejad B, Rezazadeh G, Shabani R. Stability analysis of a capacitive FGM micro-beam using modified couple stress theory. Acta Mechanica Solida Sinica. 2013;26(4):427-40. DOI: https://doi.org/10.1016/S0894-9166(13)60038-5

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[17] Mobki H, Rashvand K, Afrang S, Sadeghi MH, Rezazadeh G. Design, simulation and bifurcation analysis of a novel micromachined tunable capacitor with extended tunability. Transactions of the Canadian Society for Mechanical Engineering. 2014;38(1):1-12. DOI: https://doi.org/10.1139/tcsme-2014-0002

[18] Afrang S, Mobki H, Sadeghi MH, Rezazadeh G. A new MEMS based variable capacitor with wide tunability, high linearity and low actuation voltage. Sensors and Actuators A: Physical. 2015;46(2):191-7. DOI: https://doi.org/10.1016/j.mejo.2014.11.006

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